Dr. Matthew Hunt Profile

Dr. Matthew Hunt

at Kavli Nanoscience Institute

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Publications (1)

Proceedings Article | 3 October 2018 Paper

Design and implementation of the next generation electron beam resists for the production of EUVL photomasks

Scott Lewis, Guy DeRose, Hayden Alty, Matthew Hunt, Jarvis Li, Alex Werthiem, Trevor Fowler, Sang Kook Lee, Christopher Muryn, Grigore Timco, Axel Scherer, Stephen Yeates, Richard Winpenny

Proceedings Volume 10810, 108100N (2018) https://doi.org/10.1117/12.2501808

KEYWORDS: Chromium, Silicon, Etching, Molecules, Scattering, Nanostructures, Monte Carlo methods, Photomasks, Extreme ultraviolet lithography, Electron beam lithography

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