Dr. Sook Lee Profile

Dr. Sook Lee

at ASML

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Publications (2)

Proceedings Article | 20 March 2019 Presentation + Paper

Compact modeling of negative tone development resist with photo decomposable quencher

Ao Chen, Kar Kit Koh, Yee Mei Foong, Bradley Morgenfeld, Jun Chen, Sandra Lee, Xi Chen, Hesham Omar, Mu Feng, ChangAn Wang, Keith Gronlund, Jun Lang, James Guerrero, Yiqiong Zhao

Proceedings Volume 10961, 109610F (2019) https://doi.org/10.1117/12.2514784

KEYWORDS: Diffusion, SRAF, Photoresist processing, Calibration, Photo decomposable quencher, Semiconducting wafers, Process modeling, Performance modeling, 3D modeling, Error analysis

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Proceedings Article | 27 March 2017 Presentation + Paper

Compact 2D OPC modeling of a metal oxide EUV resist for a 7nm node BEOL layer

Adam Lyons, David Rio, Sook Lee, Thomas Wallow, Maxence Delorme, Anita Fumar-Pici, Michael Kocsis, Peter de Schepper, Michael Greer, Jason Stowers, Werner Gillijns, Danilo De Simone, Joost Bekaert

Proceedings Volume 10143, 101431E (2017) https://doi.org/10.1117/12.2260441

KEYWORDS: Optical proximity correction, Metals, Oxides, Back end of line, Extreme ultraviolet, Photomasks, Etching, Resistance, Photoresist materials, Extreme ultraviolet lithography, Calibration, Data modeling, Semiconducting wafers, Metrology, Finite element methods

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