Mr. Shin-ichi Maeda Profile

Shin-ichi Maeda

Business Vice President at Mitsubishi Chemical Corp.

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Publications (2)

Proceedings Article | 29 March 2013 Paper

Novel ArF photoresist polymer to suppress the roughness formation in plasma etching processes

Keisuke Kato, Atsushi Yasuda, Shin-ichi Maeda, Takuji Uesugi, Takeru Okada, Akira Wada, Seiji Samukawa

Proceedings Volume 8682, 86821R (2013) https://doi.org/10.1117/12.2011096

KEYWORDS: Photoresist materials, Polymers, Etching, Plasma etching, Plasma, Chemical reactions, Polymer thin films, Surface roughness, Chlorine, Chemical analysis

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Proceedings Article | 16 April 2011 Paper

Primary structure control of ArF resist polymer by regulating feed rate of monomers and initiator

Tomoya Oshikiri, Atsushi Yasuda, Keisuke Kato, Shin-ichi Maeda

Proceedings Volume 7972, 79721U (2011) https://doi.org/10.1117/12.879421

KEYWORDS: Polymers, Polymerization, Homogenization, Scanning probe microscopy, Lithography, Photoresist materials, Polymer thin films, Semiconducting wafers, Photoresist developing, Aluminum

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