Dr. Shigeki Hattori
at Toshiba Corp
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 26 March 2010 Paper
Proceedings Volume 7639, 76390S (2010) https://doi.org/10.1117/12.851392
KEYWORDS: Etching, Lithography, Molecules, Resistance, Scanning electron microscopy, Line width roughness, Oxygen, Quantum efficiency, Photoresist processing, Polymers

Proceedings Article | 26 March 2008 Paper
Proceedings Volume 6923, 69230J (2008) https://doi.org/10.1117/12.770944
KEYWORDS: Molecules, Scanning electron microscopy, Silicon, Lithography, Electron beams, Line edge roughness, Thin films, Microscopes, Solids, Crystals

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