Sangjeoung Kim
General Manager at Dongjin Semichem Co Ltd
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 26 March 2008 Paper
Proceedings Volume 6923, 69232T (2008) https://doi.org/10.1117/12.776801
KEYWORDS: Reflectivity, Etching, Refractive index, Semiconductors, Photoresist processing, Polymers, Lithography, Photorefractive polymers, Photoresist materials, Materials processing

Proceedings Article | 23 March 2007 Paper
Proceedings Volume 6519, 651947 (2007) https://doi.org/10.1117/12.711951
KEYWORDS: Polymers, Line edge roughness, Lithography, Diffusion, Extreme ultraviolet lithography, Molecules, Image resolution, Photoresist processing, Reflectivity, Image processing

Proceedings Article | 14 May 2004 Paper
Proceedings Volume 5376, (2004) https://doi.org/10.1117/12.534999
KEYWORDS: Polymers, Mask making, Lithography, Chemistry, Line edge roughness, Photomasks, Electron beam lithography, Reticles, Polymethylmethacrylate, Extreme ultraviolet lithography

Proceedings Article | 12 June 2003 Paper
Sung-Koo Lee, Jae Chang Jung, Min Suk Lee, Sung Lee, Sam Young Kim, Young-Sun Hwang, Cheol Bok, Seung-Chan Moon, Ki Shin, Sang-Jung Kim
Proceedings Volume 5039, (2003) https://doi.org/10.1117/12.485052
KEYWORDS: Etching, Reflectivity, Capillaries, Semiconducting wafers, Scanning electron microscopy, Optical lithography, Lithography, Critical dimension metrology, Atomic force microscopy, Roads

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