Mr. Sang Jeen Hong Profile

Sang Jeen Hong

Research Assistant at Georgia Institute of Technology

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Publications (2)

Proceedings Article | 29 April 2004 Paper

Automated fault detection and classification of etch systems using modular neural networks

Sang Hong, Gary May, John Yamartino, Andrew Skumanich

Proceedings Volume 5378, (2004) https://doi.org/10.1117/12.536870

KEYWORDS: Neural networks, Principal component analysis, Data modeling, Data acquisition, Etching, Plasma etching, Process modeling, Process control, Semiconductors, Reactive ion etching

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Proceedings Article | 15 July 2003 Paper

Neural-network-based time series modeling of optical emission spectroscopy data for fault detection in reactive ion etching

Sang Jeen Hong, Gary May

Proceedings Volume 5041, (2003) https://doi.org/10.1117/12.485230

KEYWORDS: Reactive ion etching, Neural networks, Etching, Principal component analysis, Data modeling, Gallium, Sensors, Neurons, Plasma, Emission spectroscopy

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