Dr. Robert Rodriguez Profile

Dr. Robert Rodriguez

at Intel Corp.

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Publications (2)

Proceedings Article | 28 April 2023 Presentation + Paper

Direct print EUV patterning of tight pitch metal layers for Intel 18A process technology node

R. Venkatesan, C. Guven, D. Bhawe, A. Greenwood, Z. Zhang, P. Gupta, P. Saksena, R. Rodriguez, N. Moumen, B. Bains, P. Sun, M. Aykol, C. Wallace, R. Bigwood, K. Fischer

Proceedings Volume 12495, 124950D (2023) https://doi.org/10.1117/12.2657778

KEYWORDS: Optical proximity correction, Printing, Extreme ultraviolet, Etching, Design rules, Optical lithography, Lithography, Design and modelling, Photoresist materials, Metals

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Proceedings Article | 1 December 2022 Presentation + Paper

Direct print EUV patterning of tight pitch metal layers for Intel 18A process technology node

R. Venkatesan, C. Guven, D. Bhawe, A. Greenwood, Z. Zhang, P. Gupta, P. Saksena, R. Rodriguez, N. Moumen, B. Bains, M. Aykol, C. Wallace, R. Bigwood, K. Fischer

Proceedings Volume 12292, 1229202 (2022) https://doi.org/10.1117/12.2641744

KEYWORDS: Optical proximity correction, Extreme ultraviolet, Photomasks, Optical lithography, Lithography, Photoresist materials, Etching, Metals, Metrology, Extreme ultraviolet lithography

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