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Robert Michels
at Fraunhofer-ILT
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Publications (1)
Proceedings Article | 26 March 2019 Paper
Spectroscopic reflectometry in the extreme ultraviolet for critical dimension metrology
Lukas Bahrenberg, Serhiy Danylyuk, Robert Michels, Sven Glabisch, Moein Ghafoori, Sascha Brose, Jochen Stollenwerk, Peter Loosen
Proceedings Volume 10959, 109591X (2019) https://doi.org/10.1117/12.2513173
KEYWORDS: Reflectivity, Extreme ultraviolet, Reflectance spectroscopy, Metrology, Critical dimension metrology, Spectroscopy, Reflectometry, Grazing incidence, Scanning electron microscopy, Scatterometry
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