Dr. Philippe Michallon Profile

Dr. Philippe Michallon

at Commissariat a l'Energie Atomique

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Author

Publications (3)

Proceedings Article | 23 March 2010 Paper

Identification, modeling, and observation of disturbing effects in EUV interferometer lithography

M. Saib, M. Besacier, C. Constancias, P. Michallon

Proceedings Volume 7636, 763628 (2010) https://doi.org/10.1117/12.851868

KEYWORDS: Diffraction gratings, Extreme ultraviolet, Diffraction, Interferometers, Lithography, Near field diffraction, Photomasks, Extreme ultraviolet lithography, Photons, Interferometry

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Proceedings Article | 21 March 2008 Paper

Design requirements for a stand alone EUV interferometer

Ph. Michallon, C. Constancias, A. Lagrange, B. Dalzotto

Proceedings Volume 6921, 69213Y (2008) https://doi.org/10.1117/12.771586

KEYWORDS: Extreme ultraviolet, Interferometers, Lithography, Optical design, Extreme ultraviolet lithography, Line edge roughness, Photomasks, Synchrotrons, Light sources, Collimation

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Proceedings Article | 21 March 2007 Paper

Structure and stability characterization of anti-adhesion self-assembled monolayers formed by vapor deposition for NIL use

Sophie Garidel, Marc Zelsmann, Pauline Voisin, Nevine Rochat, Philippe Michallon

Proceedings Volume 6517, 65172C (2007) https://doi.org/10.1117/12.711417

KEYWORDS: Nanoimprint lithography, Liquids, Self-assembled monolayers, Molecules, Fluorine, Atomic force microscopy, Ultraviolet radiation, FT-IR spectroscopy, Lithography, Natural surfaces

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