Prof. Peng Zhan
at National Lab of Solid State Microstructures
SPIE Involvement:
Author
Publications (1)

SPIE Journal Paper | 30 June 2017
Congying Fan, Xuelin Wang, Long Liu, Jian Zhang, Yushuang Cui, Peng Zhan, Changsheng Yuan, Haixiong Ge, Zhenlin Wang, Yanfeng Chen
JM3, Vol. 16, Issue 03, 033501, (June 2017) https://doi.org/10.1117/12.10.1117/1.JMM.16.3.033501
KEYWORDS: Nanolithography, Metals, Gold, Nickel, Nanoimprint lithography, Nanotechnology, Etching, Optical storage, Biosensing, Optical components

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