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Oskar Amster
at KLA Corp
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Publications (1)
Proceedings Article | 27 August 2014 Paper
Recent advances in scanning Microwave Impedance Microscopy (sMIM) for nano-scale measurements and industrial applications
Stuart Friedman, Oskar Amster, Yongliang Yang
Proceedings Volume 9173, 917308 (2014) https://doi.org/10.1117/12.2063138
KEYWORDS: Dielectrics, Microwave radiation, Atomic force microscopy, Graphene, Modulation, Microscopy, Thin films, Calibration, Crystal optics, Metrology
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