Recent advances in scanning Microwave Impedance Microscopy (sMIM) for nano-scale measurements and industrial applications

Stuart Friedman; Oskar Amster; Yongliang Yang

doi:10.1117/12.2063138

27 August 2014 Recent advances in scanning Microwave Impedance Microscopy (sMIM) for nano-scale measurements and industrial applications

Stuart Friedman, Oskar Amster, Yongliang Yang

Author Affiliations +

Proceedings Volume 9173, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII; 917308 (2014) https://doi.org/10.1117/12.2063138
Event: SPIE NanoScience + Engineering, 2014, San Diego, California, United States

Abstract

Scanning Microwave Impedance Microscopy (sMIM), a new electrical measurement mode for AFM, has shown significant success in the imaging and characterization of electrical properties at 10's of nm length scales. We review the state of the art, including imaging studies revealing electrical characteristics of novel materials and nanostructures, such as composites, graphene, patterned optical crystals and ferro-electrics. The technique is suited for a variety of metrology applications where specific physical properties are determined quantitatively. Examples include the measurement of dielectric constant (permittivity) and conductivity. These capabilities will be presented, illustrating sensitivity and resolution for dielectric constant, doping levels and capacitance.

Citation Download Citation

Stuart Friedman, Oskar Amster, and Yongliang Yang "Recent advances in scanning Microwave Impedance Microscopy (sMIM) for nano-scale measurements and industrial applications", Proc. SPIE 9173, Instrumentation, Metrology, and Standards for Nanomanufacturing, Optics, and Semiconductors VIII, 917308 (27 August 2014); https://doi.org/10.1117/12.2063138

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