Mr. Matthew A. King Profile

Matthew A. King

at Shipley Co Inc

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Author

Publications (2)

Proceedings Article | 11 June 1999 Paper

Planarizing AR for DUV lithography

Timothy Adams, Suzanne Coley, Manuel doCanto, Dana Gronbeck, Matthew King, Edward Pavelchek

Proceedings Volume 3678, (1999) https://doi.org/10.1117/12.350273

KEYWORDS: Polymers, Lithography, Glasses, Chromophores, Absorbance, Deep ultraviolet, Autoregressive models, Critical dimension metrology, Etching, Reflection

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Proceedings Article | 29 June 1998 Paper

Photoacid generation in chemically amplified resists: elucidation of structural effects of photoacid generators using new acid-sensitive dyes for monitoring acid generation

James Cameron, J. Michael Mori, Thomas Zydowsky, Doris Kang, Roger Sinta, Matthew King, Juan Scaiano, Gerd Pohlers, Susan Virdee, Terry Connolly

Proceedings Volume 3333, (1998) https://doi.org/10.1117/12.312467

KEYWORDS: Lithography, Absorption, Deep ultraviolet, Polymers, Quantum efficiency, Semiconducting wafers, Polymer thin films, Chemically amplified resists, Rhodamine B, Absorbance

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