Masanori Hirose
at KIOXIA Corp
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 10 April 2024 Presentation
Masaki Mitsuyasu, Norikazu Takeuchi, Masanori Hirose, Shunsuke Honda, Akihiko Ando, Toshiaki Komukai, Motofumi Komori, Takuya Kono
Proceedings Volume PC12956, PC129560G (2024) https://doi.org/10.1117/12.3010093
KEYWORDS: Semiconductors, Optical lithography, Etching, High volume manufacturing, Nanoimprint lithography, Line edge roughness, Semiconducting wafers, Yield improvement, Overlay metrology, Sustainable technology

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