Mr. Lionel Vignoud Profile

Lionel Vignoud

at CEA-LETI

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 27 April 2023 Poster + Paper

Die-level nano-topography metrology to characterize the stress-induced in-plane distortion contribution to overlay

Viorel Balan, Florent Michel, Ivanie Mendes, Celine Lapeyre, Lionel Vignoud, Ronald Otten, Orion Mouraille, Leon van Dijk, Blandine Minghetti, Jerome Depre, Richard van Haren

Proceedings Volume 12496, 1249633 (2023) https://doi.org/10.1117/12.2658296

KEYWORDS: Annealing, Semiconducting wafers, Metrology, Distortion, Overlay metrology, Deformation, Chemical mechanical planarization, Silicon, Optical interferometry, Manufacturing

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years