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Dr. Lingfeng Lau
at Shanghai Institute of Technical Physics
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Publications (1)
Proceedings Article | 18 June 2018 Paper
A study on ALD ZnS passivation of HgCdTe IRFPAs detectors
Proceedings Volume 10624, 106241Z (2018) https://doi.org/10.1117/12.2304578
KEYWORDS: Atomic layer deposition, Zinc, Mercury cadmium telluride, Sensors, Etching, Infrared detectors, Hydrogen, Scanning electron microscopy, Image processing, Infrared imaging
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