Dr. Changhong Sun Profile

Dr. Changhong Sun

at Shanghai Institute of Technical Physics CAS

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Publications (2)

Proceedings Article | 18 June 2018 Paper

A study on ALD ZnS passivation of HgCdTe IRFPAs detectors

A. L. Cui, Z. H. Ye, C. H. Sun, L. F. Liu, X. N. Hu, R. J. Ding, L. He

Proceedings Volume 10624, 106241Z (2018) https://doi.org/10.1117/12.2304578

KEYWORDS: Atomic layer deposition, Zinc, Mercury cadmium telluride, Sensors, Etching, Infrared detectors, Hydrogen, Scanning electron microscopy, Image processing, Infrared imaging

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Proceedings Article | 1 November 2016 Paper

Optimization of plasma etching of SiO2 as hard mask for HgCdTe dry etching

Yiyu Chen, Zhenhua Ye, Changhong Sun, Shan Zhang, Wen Xin, Xiaoning Hu, Ruijun Ding, Li He

Proceedings Volume 10157, 101573L (2016) https://doi.org/10.1117/12.2247502

KEYWORDS: Etching, Silica, Mercury cadmium telluride, Plasma etching, Dry etching

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