Dr. Laxmy Menon Profile

Dr. Laxmy Menon

at Intel Corp

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Publications (1)

Proceedings Article | 10 April 2024 Presentation

Advancing EUV patterning through pattern shaping at Intel 18A process technology node

Robert Browning, Shurong Liang, Peter Sun, Laxmy Menon, Nadjoua Moumen, Can Guven, Nathan Strutt, Mehmet Aykol, Robert Bigwood, Sarah Williams, Kevin Anglin, Amol Gupta, Steven Sherman, Kevin Fischer, Charles Wallace, Gang Shu, Bhavin Shah, Brad Taylor

Proceedings Volume PC12958, (2024) https://doi.org/10.1117/12.3010982

KEYWORDS: Extreme ultraviolet, Advanced patterning, Optical lithography, Printing, Stochastic processes, Semiconducting wafers, Lithography, Design rules

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