Dr. Kohei M. Itoh
at Keio Univ
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 23 February 2005 Paper
Atsushi Takahashi, Dong Wang, Yoshinori Matsumoto, Kohei Itoh
Proceedings Volume 5650, (2005) https://doi.org/10.1117/12.582248
KEYWORDS: Magnetism, Silicon, Reactive ion etching, Quantum communications, Quantum computing, Microfabrication, Plasma, Computer architecture, Etching, Photomasks

Conference Committee Involvement (1)
Micro- and Nanotechnology: Materials, Processes, Packaging, and Systems II
13 December 2004 | Sydney, Australia
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