Dr. Kai-Hsiang Chang Profile

Dr. Kai-Hsiang Chang

at Synopsys Taiwan Co., Ltd.

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Author

Publications (3)

Proceedings Article | 12 November 2024 Presentation + Paper

Assessing need and methodology for mask constraints in ILT applications

Mohamed Ramadan, Chris Progler, Henry Kamberian, Jinju Beineke, Michael Green, Guangming Xiao, Ming-Feng Shen, Kai-Hsiang Chang, Kyle Braam, Alex Zepka, Yu-Po Tang, Szu Ping Chen, Eric Huang, Gloria Yeh, Nicole Wu, Chun-Cheng Liao

Proceedings Volume 13216, 132161Q (2024) https://doi.org/10.1117/12.3042434

KEYWORDS: Semiconducting wafers, Printing, Vestigial sideband modulation, Photoresist processing, Simulations, Design rules, Chip manufacturing, SRAF, Optical proximity correction, Lithography

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SPIE Journal Paper | 24 November 2023

Curvilinear mask handling in OPC flow

Yung-Yu Chen, Kai-Hsiang Chang, Wen-Li Cheng, Yu-Po Tang

JM3, Vol. 23, Issue 01, 011203, (November 2023) https://doi.org/10.1117/12.10.1117/1.JMM.23.1.011203

KEYWORDS: Optical proximity correction, Shrinkage, Shape analysis, Visualization, Optical lithography, Nonlinear control, Manufacturing, Lithography, Industry, Histograms

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Proceedings Article | 28 April 2023 Presentation + Paper

Curvilinear mask handling in OPC flow

Yung-Yu Chen, Kai-Hsiang Chang, Wen-Li Cheng, Yu-Po Tang

Proceedings Volume 12495, 1249505 (2023) https://doi.org/10.1117/12.2663274

KEYWORDS: Optical proximity correction, Shrinkage, Nonlinear control, Histograms, Shape analysis, Model-based design, Lithography, Industry

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