Dr. Junji Kotani Profile

Dr. Junji Kotani

at Fujitsu Labs Ltd

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Publications (2)

Proceedings Article | 5 March 2021 Presentation

High-temperature growth of high-purity AlN layers on AlN substrates by HVPE

Nao Takekawa, Ken Goto, Toru Nagashima, Reo Yamamoto, Junji Kotani, Yoshinao Kumagai

Proceedings Volume 11686, 116861F (2021) https://doi.org/10.1117/12.2577988

KEYWORDS: Aluminum nitride, Silicon, Quartz, Crystals, Temperature metrology, Semiconductors, Manufacturing, Glasses, Aluminum

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Proceedings Article | 5 March 2021 Presentation

Mass production of AlN substrates by high speed homoepitaxial growth

Yoshinao Kumagai, Nao Takekawa, Ken Goto, Toru Nagashima, Reo Yamamoto, Junji Kotani

Proceedings Volume 11706, 117060M (2021) https://doi.org/10.1117/12.2577987

KEYWORDS: Aluminum nitride, Deep ultraviolet, Transparency, Viruses, Vapor phase epitaxy, Solid state electronics, Reliability, Optical components, Metals

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