The combined storage and amplifier structure of a Depleted P-channel Field-Effect Transistor provides the capability to collect, store and read out charge carriers. In combination with an efficient charge transfer between two storage regions, this enables a statistically independent repetitive non-destructive readout of active pixels integrated on a fully depleted, high purity silicon bulk. Averaging the repetitions allows for deep sub-electron noise levels. After the working principle of those sensors was demonstrated on single pixel devices, a 64×64 pixel detector has been operated for the first time. The sensor achieved a single electron sensitivity by recording the spectrum of a light emitting diode. A mean sub-electron noise below 0.2 e−ENC at a readout time below 230 ms/frame are demonstrated.
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