Prof. Joachim N. Burghartz Profile

Prof. Joachim N. Burghartz

Director at Institut für Mikroelektronik Stuttgart

SPIE Involvement:

Author

Proceedings Article | 22 February 2021 Presentation + Paper

Multidimensional process optimization of a negative e-beam photoresist for silicon-waveguide manufacturing

Markus Greul, Holger Sailer, Mathias Kaschel, Joachim Burghartz

Proceedings Volume 11612, 116120I (2021) https://doi.org/10.1117/12.2582491

KEYWORDS: Photoresist materials, Lithography, Manufacturing, Silicon, Waveguides, Silicon photonics, Photonic devices, Semiconducting wafers, Scattering, Prototyping

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Proceedings Article | 20 August 2020 Presentation

Comparison of the high-frequency performance of staggered and coplanar organic thin-film transistors using two-port network analysis

James Borchert, Ute Zschieschang, Florian Letzkus, Michele Giorgio, R. Thomas Weitz, Mario Caironi, Joachim Burghartz, Sabine Ludwigs, Hagen Klauk

Proceedings Volume 11476, 114760U (2020) https://doi.org/10.1117/12.2567978

KEYWORDS: Thin films, Transistors, Network security, Resistance, Silicon, Photomasks, Lithography

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Proceedings Article | 5 October 2015 Presentation

Flexible low-voltage organic integrated circuits with megahertz switching frequencies (Presentation Recording)

Ute Zschieschang, Kazuo Takimiya, Tarek Zaki, Florian Letzkus, Harald Richter, Joachim Burghartz, Hagen Klauk

Proceedings Volume 9569, 95690E (2015) https://doi.org/10.1117/12.2187847

KEYWORDS: Integrated circuits, Organic semiconductors, Switching, Transistors, Oscillators, Thin films, Electrodes, Silicon, Photomasks, Optical lithography

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Proceedings Article | 5 May 2015 Paper

Generation of red color and near infrared bandpass filters using nano-scale plasmonic structures

Ahmed Sokar, Franz Hutter, Joachim Burghartz

Proceedings Volume 9502, 95020U (2015) https://doi.org/10.1117/12.2179065

KEYWORDS: Aluminum, Metals, Silicon, Silica, Etching, Plasmonics, Cameras, Semiconducting wafers, Dielectrics, Optical filters

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Proceedings Article | 14 October 2011 Paper

Si stencil masks for organic thin film transistor fabrication

Florian Letzkus, Tarek Zaki, Frederik Ante, Harald Richter, Joachim Burghartz, Jörg Butschke, Hagen Klauck

Proceedings Volume 8166, 81662B (2011) https://doi.org/10.1117/12.899168

KEYWORDS: Photomasks, Silicon, Etching, Gold, Metals, Electron beam lithography, Semiconducting wafers, Scanning electron microscopy, Aluminum, Transistors

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Proceedings Article | 26 April 2008 Paper

A new high speed thermal imaging concept based on a logarithmic CMOS imager technology

Franz Hutter, Daniel Brosch, Joachim Burghartz, Heinz-Gerd Graf, Markus Strobel

Proceedings Volume 7003, 70030H (2008) https://doi.org/10.1117/12.780510

KEYWORDS: Thermography, Temperature metrology, Cameras, Pyrometry, Optical filters, Sensors, Imaging systems, Silicon, CMOS technology, Visualization

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Proceedings Article | 28 September 2001 Paper

Direct spray coating of photoresist for MEMS applications

Nga Pham, Tom Scholtes, Ruud Klerk, Bernhard Wieder, Pasqualina Sarro, Joachim Burghartz

Proceedings Volume 4557, (2001) https://doi.org/10.1117/12.442960

KEYWORDS: Semiconducting wafers, Coating, Photoresist materials, Microelectromechanical systems, Electroplating, Scanning electron microscopy, Photography, Lithography, Plating, Metals

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