Dr. Jelmer M. Boter Profile

Dr. Jelmer M. Boter

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Publications (1)

Proceedings Article | 22 February 2021 Presentation + Paper

Fast in-device overlay metrology on multi-tier 3DNAND devices without DECAP and its applications in process characterization and control

Yaobin Feng, Pandeng Xuan, Dean Wu, Bruce Yang, Craig Xu, Neo Liu, Pavel Izikson, Huanian You, Xi-Zhi Yan, Vladimir Markov, Yvon Chai, Chaoyu Chen, Bert Verstraeten, Amy Wang, Gonzalo Sanguinetti, Giacomo Miceli, Jelmer Boter, Vidar Van der Meijden, Hua Li, Babak Mozooni

Proceedings Volume 11611, 116110V (2021) https://doi.org/10.1117/12.2583416

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