Bert Verstraeten
at ASML Netherlands BV
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 13 June 2022 Poster
Proceedings Volume 12053, 120531F (2022) https://doi.org/10.1117/12.2615979
KEYWORDS: Signal detection, Overlay metrology, Metrology, Logic, Scanning electron microscopy, Etching, Yield improvement, Optical metrology, Inspection, Front end of line

Proceedings Article | 22 February 2021 Presentation + Paper
Proceedings Volume 11611, 116110V (2021) https://doi.org/10.1117/12.2583416

Proceedings Article | 20 March 2020 Paper
Proceedings Volume 11325, 1132522 (2020) https://doi.org/10.1117/12.2553054
KEYWORDS: Optical metrology, Overlay metrology, Semiconducting wafers, Signal processing, Metrology, Machine learning, Image processing, Optical signal processing, Optics manufacturing

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