Mr. Hung-Chi Hsiao Profile

Hung-Chi Hsiao

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Publications (2)

Proceedings Article | 3 September 1998 Paper

Flat-type metal residue-induced metal line bridge

Hung-Chi Hsiao, Po-Tao Chu, Y.M. Hsu, Chia-Hsiang Chen

Proceedings Volume 3507, (1998) https://doi.org/10.1117/12.324336

KEYWORDS: Particles, Metals, Semiconducting wafers, Etching, Bridges, Optical microscopes, Manufacturing, Molecular bridges, Defect inspection, Optical inspection

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Proceedings Article | 11 September 1997 Paper

Characterization of environmental halogen molecule contamination-induced pad surface corrosion

Po-Tao Chu, Ching-Wen Cho, Hung-Chi Hsiao, Jie-Shin Wu, Chih-Chien Hung, Ying-Chen Chao

Proceedings Volume 3216, (1997) https://doi.org/10.1117/12.284704

KEYWORDS: Corrosion, Chlorine, Metals, Molecules, Semiconducting wafers, Contamination, Chlorine gas, Photoresist materials, Halogens, Tungsten

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