Characterization of environmental halogen molecule contamination-induced pad surface corrosion

Po-Tao Chu; Ching-Wen Cho; Hung-Chi Hsiao; Jie-Shin Wu; Chih-Chien Hung; Ying-Chen Chao

doi:10.1117/12.284704

11 September 1997 Characterization of environmental halogen molecule contamination-induced pad surface corrosion

Po-Tao Chu, Ching-Wen Cho, Hung-Chi Hsiao, Jie-Shin Wu, Chih-Chien Hung, Ying-Chen Chao

Proceedings Volume 3216, Microelectronic Manufacturing Yield, Reliability, and Failure Analysis III; (1997) https://doi.org/10.1117/12.284704
Event: Microelectronic Manufacturing, 1997, Austin, TX, United States

Abstract

The photoresist stripping process in passivation stage could induce the bonding pad surface corrosion (Figure-i). And the bonding pad surface corrosion rates will be accelerated if the chlorine concentration levels reach 5 to i 0 ppb in the cleanroom environment. The facility hookup of the exhaust pipelines and the cross contamination between the different airflow system has been identified to be critical regarding the chlorine concentration levels. In order to improve the pad surface susceptibility toward the chlorine molecules induced pad surface corrosion, the CF4 treatment is proposed with excellent passivation and replacement effects.

Citation Download Citation

Po-Tao Chu, Ching-Wen Cho, Hung-Chi Hsiao, Jie-Shin Wu, Chih-Chien Hung, and Ying-Chen Chao "Characterization of environmental halogen molecule contamination-induced pad surface corrosion", Proc. SPIE 3216, Microelectronic Manufacturing Yield, Reliability, and Failure Analysis III, (11 September 1997); https://doi.org/10.1117/12.284704

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available