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George E. Sery
Director, Device Technology at Intel Corp
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Publications (6)
Proceedings Article | 12 July 2002 Paper
Approaching the one billion transistor logic product: process and design challenges
Proceedings Volume 4692, (2002) https://doi.org/10.1117/12.475662
KEYWORDS: Transistors, Logic, Dielectrics, Optical lithography, Optical proximity correction, Lithography, Databases, Control systems, Product engineering, Performance modeling
Proceedings Article | 4 September 1998 Paper
Microprocessor technology challenges through the next decade
Proceedings Volume 3506, (1998) https://doi.org/10.1117/12.323968
KEYWORDS: Transistors, Lithography, Manufacturing, Oxides, Metals, Resistance, Dielectrics, Critical dimension metrology, Capacitance, Copper
Proceedings Article | 4 September 1998 Paper
Microprocessor technology challenges through the next decade
Proceedings Volume 3508, (1998) https://doi.org/10.1117/12.324034
KEYWORDS: Transistors, Lithography, Manufacturing, Oxides, Metals, Resistance, Dielectrics, Critical dimension metrology, Capacitance, Copper
Proceedings Article | 3 September 1998 Paper
Microprocessor technology challenges through the next decade
Proceedings Volume 3507, (1998) https://doi.org/10.1117/12.324344
KEYWORDS: Transistors, Lithography, Manufacturing, Oxides, Metals, Resistance, Dielectrics, Critical dimension metrology, Capacitance, Copper
Proceedings Article | 28 August 1998 Paper
Microprocessor technology challenges through the next decade
Proceedings Volume 3510, (1998) https://doi.org/10.1117/12.324378
KEYWORDS: Transistors, Lithography, Manufacturing, Oxides, Metals, Resistance, Dielectrics, Critical dimension metrology, Capacitance, Copper
Showing 5 of 6 publications
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