Mr. Dongwen Hu Profile

Dongwen Hu

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 18 March 2024 Paper

Application of IBE etching process in EBAPS device

Huaiyun Fan, Hesheng Tan, Yaobin Li, Yongfa Dong, Shiqi Yang, Xin Zhang, Huabing Deng, Zhou Fang, Dongwen Hu, Zhujun Chu, Linwei Song

Proceedings Volume 13104, 131045J (2024) https://doi.org/10.1117/12.3023680

KEYWORDS: Etching, Surface roughness, Passivation, Silicon, Back illuminated sensors, Light sources and illumination, Signal to noise ratio, Ion beams, Aluminum, CMOS sensors

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years