Mr. Dong-Min Kim Profile

Dong-Min Kim

at SAMSUNG Electronics Co Ltd

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Author

Publications (2)

Proceedings Article | 10 April 2024 Presentation

Process incoming control for advanced EUV overlay strategy enabling mass production of GAA nanosheet

SungWoon Uh, Dong-Min Kim, Dooho Park, Jae Hyoung Kim, Sangil Son, Insung kim

Proceedings Volume PC12953, PC129530N (2024) https://doi.org/10.1117/12.3010035

KEYWORDS: Extreme ultraviolet, Semiconducting wafers, Overlay metrology, Optical alignment, Logic, Process control, Modeling, Mathematical optimization

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Proceedings Article | 27 April 2023 Poster + Paper

Exploiting spatial characteristic of wafer for effective OCW: area partitioning OCW

Gilwoo Song, Dooho Kang, Sungchai Kim, Sungwon Park, Taeyong Jo, Euiseok Kum, Jonghyun Lee, Dooho Park, Dongmin Kim, Sungwoon Uh, Jaehyung Kim

Proceedings Volume 12496, 124963N (2023) https://doi.org/10.1117/12.2670089

KEYWORDS: Deformation, Semiconducting wafers, Overlay metrology, Control systems, Optical alignment, Lithography, Machine learning

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