Dr. Dmitry Androsov Profile

Dr. Dmitry Androsov

SPIE Involvement:

Author

Publications (1)

Proceedings Article | 9 April 2024 Presentation + Paper

Development of high contrast EUV photoresist for narrow pitch C/H patterning

Yonghoon Moon, Sungan Do, Hana Kim, Seungchul Kwon, Hoyoon Park, Cheol Kang, Jae-Jun Lee, Chanjae Ahn, Dmitry Androsov, Minsang Kim, Suk-Koo Hong

Proceedings Volume 12957, 129570O (2024) https://doi.org/10.1117/12.3009393

KEYWORDS: Optical lithography, Extreme ultraviolet, Extreme ultraviolet lithography, Photoresist materials, Photoresist developing, Solubility, Switching, Semiconductors, Photoresist processing

Read Abstract +

View contact details

UPDATE YOUR PROFILE

Is this your profile? Update it now.

Sign into your SPIE.org account

Don’t have a profile and want one?

Create an account on SPIE.org

Keywords/Phrases

Search In:

Publication Years