Dr. Chanjae Ahn Profile

Dr. Chanjae Ahn

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Publications (1)

Proceedings Article | 9 April 2024 Presentation + Paper

Development of high contrast EUV photoresist for narrow pitch C/H patterning

Yonghoon Moon, Sungan Do, Hana Kim, Seungchul Kwon, Hoyoon Park, Cheol Kang, Jae-Jun Lee, Chanjae Ahn, Dmitry Androsov, Minsang Kim, Suk-Koo Hong

Proceedings Volume 12957, 129570O (2024) https://doi.org/10.1117/12.3009393

KEYWORDS: Optical lithography, Extreme ultraviolet, Extreme ultraviolet lithography, Photoresist materials, Photoresist developing, Solubility, Switching, Semiconductors, Photoresist processing

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