Dr. Detlef Hofmann Profile

Dr. Detlef Hofmann

Lithography Engineer at Infineon Technologies Dresden

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Publications (13)

Proceedings Article | 13 March 2018 Paper

Geometry-based across wafer process control in a dual damascene scenario

Gerd Krause, Detlef Hofmann, Boris Habets, Stefan Buhl, Manuela Gutsch, Alberto Lopez-Gomez, Xaver Thrun

Proceedings Volume 10585, 105852C (2018) https://doi.org/10.1117/12.2302972

KEYWORDS: Resistance, Etching, Semiconducting wafers, Copper, Chemical mechanical planarization, Oxides, Critical dimension metrology, Metals, Scatter measurement, Scatterometry

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Proceedings Article | 13 March 2018 Paper

In-depth analysis and characterization of a dual damascene process with respect to different CD

Gerd Krause, Detlef Hofmann, Boris Habets, Stefan Buhl, Manuela Gutsch, Alberto Lopez-Gomez, Wan-Soo Kim, Xaver Thrun

Proceedings Volume 10585, 105852T (2018) https://doi.org/10.1117/12.2302971

KEYWORDS: Critical dimension metrology, Oxides, Capacitance, Semiconducting wafers, Etching, Metals, Resistance, Copper, Photomasks, Chemical mechanical planarization

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Proceedings Article | 28 March 2017 Presentation + Paper

In-depth analysis of indirect overlay method and applying in production environment

Detlef Hofmann, Frank Rabe, Stefan Buhl, Wan-Soo Kim, Boris Habets

Proceedings Volume 10145, 101450E (2017) https://doi.org/10.1117/12.2257963

KEYWORDS: Distortion, Overlay metrology, Process control, Virtual reality, Metrology, Environmental sensing, Front end of line, Back end of line, Reliability, Statistical analysis, Semiconducting wafers, Model-based design, Metals, Data modeling, Optical alignment

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Proceedings Article | 26 March 2015 Paper

Rigorous wafer topography simulation for investigating wafer alignment quality and robustness

Nicoló Morgana, Dmitrii Gavrilin, Andreas Greiner, Detlef Hofmann, Itaru Kamohara, Ulrich Klostermann, Holger Moeller, Juergen Preuninger

Proceedings Volume 9426, 94260S (2015) https://doi.org/10.1117/12.2086075

KEYWORDS: Optical alignment, Semiconducting wafers, Signal processing, Silicon, Oxides, Computer simulations, Manufacturing, Visualization, Metals, Etching

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Proceedings Article | 24 March 2006 Paper

Lithography rework reduction and improved process control using AIM targets on aluminum layers in the high-volume production of 110-nm DRAM devices

Detlef Hofmann, Frank Rabe, Yosef Avrahamov, Christian Sparka

Proceedings Volume 6152, 61522B (2006) https://doi.org/10.1117/12.653360

KEYWORDS: Aluminum, Overlay metrology, Process control, Etching, Semiconducting wafers, Data modeling, Lithography, Metrology, Sputter deposition, Metals

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Proceedings Article | 9 June 2004 Paper

Lightning-safe diaphragm pressure gauge for geotechnical applications using a long-term reliable absolute EFPI sensor

Detlef Hofmann, Frank Basedau, Wolfgang Habel, R. Gloetzl

Proceedings Volume 5502, (2004) https://doi.org/10.1117/12.566543

KEYWORDS: Sensors, Head, Interferometers, Fiber optics sensors, Calibration, Fiber optics, Interferometry, Signal detection, Measurement devices, Power supplies

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Proceedings Article | 2 June 2004 Paper

Contact layer printing using alternating phase-shifting masks: mask making, patterning results, and production implementation

Rainer Pforr, Wolfgang Dettmann, M. Eisenhut, Mario Hennig, Detlef Hofmann, Joerg Thiele, Guido Thielscher

Proceedings Volume 5504, (2004) https://doi.org/10.1117/12.568032

KEYWORDS: Manufacturing, Overlay metrology, Photomasks, Etching, Phase shifts, Scanners, Critical dimension metrology, Quartz, Mask making, Optical lithography

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Proceedings Article | 8 July 2003 Paper

Comparison of strain sensitivity of bare and structure-integrated fiber Bragg gratings

Solomija Lebid, Detlef Hofmann, Frank Basedau, Werner Daum

Proceedings Volume 5036, (2003) https://doi.org/10.1117/12.498346

KEYWORDS: Fiber Bragg gratings, Sensors, Aluminum, Optical fibers, Temperature metrology, Signal attenuation, Digital signal processing, Silica, Calibration, Structured optical fibers

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Proceedings Article | 27 June 2002 Paper

Characterization of bond performance of textiles in cement matrices using fiber optic sensors

Matthias Molter, Josef Hegger, Wolfgang Habel, Detlef Hofmann, Toivo Gutmann, Frank Basedau

Proceedings Volume 4694, (2002) https://doi.org/10.1117/12.472626

KEYWORDS: Sensors, Fiber optics sensors, Cements, Optical fibers, Matrices, Interferometers, Glasses, Structural engineering, Composites, Mirrors

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Proceedings Article | 27 June 2002 Paper

Strain monitoring of a newly developed precast concrete track for high speed railway traffic using embedded fiber optic sensors

Stephanie Crail, D. Reichel, U. Schreiner, E. Lindner, Wolfgang Habel, Detlef Hofmann, Frank Basedau, K. Brandes, A. Barner, Wolfgang Ecke, Kerstin Schroeder

Proceedings Volume 4694, (2002) https://doi.org/10.1117/12.472627

KEYWORDS: Sensors, Fiber optics sensors, Fiber Bragg gratings, Silver, Interferometers, Interfaces, Cements, Coating, Calibration, Glasses

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Proceedings Article | 27 June 2002 Paper

Complex measurement system for long-term monitoring of prestressed railway bridges in the new Lehrter Bahnhof in Berlin

Wolfgang Habel, Detlef Hofmann, H. Kohlhoff, J. Knapp, K. Brandes, H. Haenichen, Daniele Inaudi

Proceedings Volume 4694, (2002) https://doi.org/10.1117/12.472624

KEYWORDS: Sensors, Bridges, Fiber optics sensors, Fiber optics, Glasses, Mirrors, Complex systems, Laser optics, Internet, Mathematical modeling

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Proceedings Article | 13 September 1994 Paper

Strain measurements in reinforced concrete walls during the hydration reaction by means of embedded fibre interferometers

Wolfgang Habel, Detlef Hofmann

Proceedings Volume 2361, (1994) https://doi.org/10.1117/12.184820

KEYWORDS: Sensors, Interferometers, Calibration, Head, Fiber optics sensors, Ear, Cements, Power supplies, Single mode fibers, Silicon

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Proceedings Article | 13 September 1994 Paper

Determination of structural parameters concerning load capacity based on fibre Fabry-Perot interferometers

Wolfgang Habel, Detlef Hofmann

Proceedings Volume 2361, (1994) https://doi.org/10.1117/12.184819

KEYWORDS: Sensors, Bridges, Fiber optics sensors, Interferometry, Adhesives, Manufacturing, Structured optical fibers, Fiber optics, Smart materials, Inspection

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Showing 5 of 13 publications

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