Dr. Chu-Ya (Jennifer) Yang Profile

Dr. Chu-Ya (Jennifer) Yang

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Area of Expertise:

Chemistry , Biomaterials , Microfluidics , Hydrogels , Tissue Engineering , Semiconductor

Publications (1)

Proceedings Article | 29 March 2013 Paper

Sub-14 nm HSQ line patterning by e-beam dose proximity effect correction assisted with designed line CD/pitch split

Wei-Su Chen, Chu-Ya Yang, Chiung Yu Lo, Hung-Wen Wei, Frederick Chen, Tzu-Kun Ku

Proceedings Volume 8682, 868211 (2013) https://doi.org/10.1117/12.2010364

KEYWORDS: Standards development, Modulation, Image resolution, Electron beam lithography, Scattering, Critical dimension metrology, Laser scattering, Oxides, Backscatter, Point spread functions

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