Dr. Frederick T. Chen
Sr. Technology Manager at Winbond Electronics
SPIE Involvement:
Author
Publications (12)

SPIE Journal Paper | 25 March 2014
Frederick Chen, Wei-Su Chen, Ming-Jinn Tsai, Tzu-Kun Ku
JM3, Vol. 13, Issue 01, 011008, (March 2014) https://doi.org/10.1117/12.10.1117/1.JMM.13.1.011008
KEYWORDS: Optical lithography, Etching, Photoresist materials, Photomasks, Phase shifts, Photoresist developing, Modulation, Double patterning technology, Distortion, Anisotropic etching

Proceedings Article | 12 April 2013 Paper
Frederick Chen, Wei-Su Chen, Ming-Jinn Tsai, Tzu-Kun Ku
Proceedings Volume 8683, 868311 (2013) https://doi.org/10.1117/12.2008886
KEYWORDS: Photomasks, Photoresist materials, Etching, Optical lithography, Phase shifts, Electron beam lithography, Modulation, Phase shift keying, Immersion lithography, Double patterning technology

Proceedings Article | 29 March 2013 Paper
Wei-Su Chen, Peng-Sheng Chen, Hong Chih Chen, Hung-Wen Wei, Frederick Chen, Tzu-Kun Ku
Proceedings Volume 8685, 86850S (2013) https://doi.org/10.1117/12.2010377
KEYWORDS: Etching, Image processing, Scanning electron microscopy, Cadmium, Electron beam lithography, Tin, Oxides, Resistance, Atomic layer deposition, Critical dimension metrology

Proceedings Article | 29 March 2013 Paper
Wei-Su Chen, Chu-Ya Yang, Chiung Yu Lo, Hung-Wen Wei, Frederick Chen, Tzu-Kun Ku
Proceedings Volume 8682, 868211 (2013) https://doi.org/10.1117/12.2010364
KEYWORDS: Standards development, Modulation, Image resolution, Electron beam lithography, Scattering, Critical dimension metrology, Laser scattering, Oxides, Backscatter, Point spread functions

Proceedings Article | 20 March 2012 Paper
Wei-Su Chen, Peng-Sheng Chen, Hung-Wen Wei, Frederick Chen, Ming-Jinn Tsai, Tzu-Kun Ku
Proceedings Volume 8325, 83250V (2012) https://doi.org/10.1117/12.915474
KEYWORDS: Etching, Cadmium, Image resolution, Electron beam lithography, Plasmas, Photomasks, Carbon, Coating, Plasma etching, Fluorine

Showing 5 of 12 publications
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