CONFERENCE PROCEEDINGS
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Aijiao Zhu
at KLA China
SPIE Involvement:
Author
Publications (2)
Proceedings Article | 26 May 2022 Presentation + Paper
A novel methodology for wafer-level scanner focus spot capture and back-tracing mechanism
Chieh-Chen Chiu, Mingqi Gao, Feng Tian, Wei Feng, Andy Lan, Dan Li, Shengyuan Zhong, Aijiao Zhu, Ningqi Zhu, Yunchen Xu, Jin Zhu, Jincheng Pei, Kevin Huang
Proceedings Volume 12053, 120530U (2022) https://doi.org/10.1117/12.2627284
KEYWORDS: Semiconducting wafers, Contamination, Scanners, Data processing, Statistical analysis, Detection and tracking algorithms, Optical lithography, Lithography, Data analysis
Proceedings Article | 26 May 2022 Poster + Presentation + Paper
Overcome machine to machine overlay for better scanner mix-run control
Chieh-Chen Chiu, Feng Tian, Wei Feng, Mingqi Gao, Andy Lan, Aijiao Zhu, Ningqi Zhu, Dan Li, Jin Zhu, Jincheng Pei, Kevin Huang
Proceedings Volume 12053, 1205318 (2022) https://doi.org/10.1117/12.2614372
KEYWORDS: Scanners, Optical parametric oscillators, Semiconducting wafers, Reticles, Performance modeling, Optical lithography, Switching, Manufacturing, Lithography
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