CONFERENCE PROCEEDINGS
Advanced Search
Home > Proceedings > Volume PC12898 > Article
Presentation
13 March 2024 Direct laser writing for merging 2D and 3D metrological calibration tasks
Julian Hering-Stratemeier, Matthias Eifler, Jörg Seewig, Georg von Freymann
Author Affiliations +
Proceedings Volume PC12898, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVII; PC128980H (2024) https://doi.org/10.1117/12.3002597
Event: SPIE OPTO, 2024, San Francisco, California, United States
Abstract
Material measures, crucial for calibrating measuring instruments in metrology, face limitations due to their standardized categorization as being either profile kind or areal kind. To ensure comparability and uncertainty estimation across different measuring instruments, we explore to adapt these material measures (reflective micro-optics) for multiple types of instruments using additive manufacturing on the microscale - namely direct laser writing. This flexible technology allows to extend profiled material measures to be usable for areal surface topography instruments and vice versa. The thus revised micro-structures are designed, manufactured, and measured to practically demonstrate the possibilities for a multifunctional calibration of different measuring instrument categories, as well as to illustrate the effect of directionality on the results. Moreover, fortunately, 3D µ-printing enables the fabrication of all structures on a single sample, reducing costs and time for the calibration tasks in research and industry.
Conference Presentation
© (2024) COPYRIGHT Society of Photo-Optical Instrumentation Engineers (SPIE). Downloading of the abstract is permitted for personal use only.
Citation Download Citation
Julian Hering-Stratemeier, Matthias Eifler, Jörg Seewig, and Georg von Freymann "Direct laser writing for merging 2D and 3D metrological calibration tasks", Proc. SPIE PC12898, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics XVII, PC128980H (13 March 2024); https://doi.org/10.1117/12.3002597
ACCESS THE FULL ARTICLE
ORGANIZATIONAL
Sign in with credentials provided by your organization.
INSTITUTIONAL
Select your institution to access the SPIE Digital Library.
SELECT YOUR INSTITUTION
PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.
PERSONAL SIGN IN
No SPIE Account? Create one
PURCHASE THIS CONTENT
SUBSCRIBE TO DIGITAL LIBRARY
50 downloads per 1-year subscription
Members: $195
Non-members: $335 ADD TO CART
25 downloads per 1 - year subscription
Members: $145
Non-members: $250 ADD TO CART
PURCHASE SINGLE ARTICLE
Includes PDF, HTML & Video, when available
Members: $17.00
Non-members: $21.00 ADD TO CART
PROCEEDINGS
 PRESENTATION
WATCH
PRESENTATION SAVE TO MY LIBRARY
GET CITATION
Advertisement
Advertisement
KEYWORDS
Calibration
Equipment
Metrology
Multiphoton lithography
3D metrology
Manufacturing
Micro optics
RELATED CONTENT
Subscribe to Digital Library
Receive Erratum Email Alert
Back to Top