Progress in the specification of optical instruments for the measurement of surface form and texture

Peter J. de Groot

doi:10.1117/12.2054435

28 May 2014 Progress in the specification of optical instruments for the measurement of surface form and texture

Peter J. de Groot

Proceedings Volume 9110, Dimensional Optical Metrology and Inspection for Practical Applications III; 91100M (2014) https://doi.org/10.1117/12.2054435
Event: SPIE Sensing Technology + Applications, 2014, Baltimore, MD, United States

Abstract

Specifications for confocal microscopes, optical interferometers and other methods of measuring areal surface topography can be confusing and misleading. The emerging ISO 25178 standards, together with the established international vocabulary of metrology, provide a foundation for improved specifications for 3D surface metrology instrumentation. The approach in this paper links instrument specifications to metrological characteristics that can influence a measurement, using consistent definitions of terms, and reference to verification procedures.

Citation Download Citation

Peter J. de Groot "Progress in the specification of optical instruments for the measurement of surface form and texture", Proc. SPIE 9110, Dimensional Optical Metrology and Inspection for Practical Applications III, 91100M (28 May 2014); https://doi.org/10.1117/12.2054435

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