Compatibility analysis of profile and areal material measures

Matthias Eifler; Julian Hering-Stratemeier; Georg von Freymann; Jörg Seewig

doi:10.1117/12.2672243

15 August 2023 Compatibility analysis of profile and areal material measures

Matthias Eifler, Julian Hering-Stratemeier, Georg von Freymann, Jörg Seewig

Proceedings Volume 12618, Optical Measurement Systems for Industrial Inspection XIII; 1261812 (2023) https://doi.org/10.1117/12.2672243
Event: SPIE Optical Metrology, 2023, Munich, Germany

Abstract

The standardized material measures of ISO 25178-70 are categorized as either profile or areal surface geometry with regard to their application. This categorization limits many types of material measures to be only applicable to certain types of measuring instruments. To enable comparability and uncertainty estimation for many different types of measuring instruments, we examine the adaption of the either profile or areal assigned standardized material measures of ISO 25178-70 to multiple types of measuring instruments. For this enhancement the structures can be either imaged in different lateral directions, or changed to circular geometries that allow a sampling in different directions. The revised geometries are designed, manufactured, and measured to practically demonstrate the possibilities for a multifunctional calibration of different measuring instrument categories and to illustrate the effect of directionality on the results. Many types of material measures which are assigned to the calibration of profile measuring instruments can be enhanced to also allow a specific calibration of areal surface topography measuring instruments and the additional axes that is introduced hereby.

Conference Presentation

Citation Download Citation

Matthias Eifler, Julian Hering-Stratemeier, Georg von Freymann, and Jörg Seewig "Compatibility analysis of profile and areal material measures", Proc. SPIE 12618, Optical Measurement Systems for Industrial Inspection XIII, 1261812 (15 August 2023); https://doi.org/10.1117/12.2672243

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