Physical force optimization for advanced photomask cleaning

C. W. Shen; K. W. Lin; C. L. Lu; Luke Hsu; Angus Chin; Anthony Yen

doi:10.1117/12.2028484

28 June 2013 Physical force optimization for advanced photomask cleaning

C. W. Shen, K. W. Lin, C. L. Lu, Luke Hsu, Angus Chin, Anthony Yen

Proceedings Volume 8701, Photomask and Next-Generation Lithography Mask Technology XX; 870106 (2013) https://doi.org/10.1117/12.2028484
Event: Photomask and NGL Mask Technology XX, 2013, Yokohama, Japan

Abstract

We investigated methods to extend the damage-free process window for fragile Sub-Resolution Assist Features (SRAF) in mask cleaning using MegaSonic and binary spray techniques. Particle removal efficiency (PRE) was found to increase by 8% and damage reduced from 7 ppm to 0 ppm with the optimization of the spray droplet characteristics through liquid media control. MegaSonic damage was eliminated completely from 10 ppm to 0 ppm by varying physical and chemical properties of the cleaning media. Since particles in the deep trenches are very difficult to remove using droplet spray alone, a combination of MegaSonic and Binary Spray processes was tested. The acoustic effects generated through the MegaSonic combined with optimized droplet impact showed an improvement of 4% in PRE of hard-to-remove trench particles. Overall, the improved process points to a promising solution for overcoming the roadblock in mask cleaning for the advanced mask cleaning.

Citation Download Citation

C. W. Shen, K. W. Lin, C. L. Lu, Luke Hsu, Angus Chin, and Anthony Yen "Physical force optimization for advanced photomask cleaning", Proc. SPIE 8701, Photomask and Next-Generation Lithography Mask Technology XX, 870106 (28 June 2013); https://doi.org/10.1117/12.2028484

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available