Effect of cleaning chemistry on MegaSonic damage

Sherjang Singh; Uwe Dietze; Peter Dress

doi:10.1117/12.2027974

28 June 2013 Effect of cleaning chemistry on MegaSonic damage

Sherjang Singh, Uwe Dietze, Peter Dress

Proceedings Volume 8701, Photomask and Next-Generation Lithography Mask Technology XX; 870104 (2013) https://doi.org/10.1117/12.2027974
Event: Photomask and NGL Mask Technology XX, 2013, Yokohama, Japan

Abstract

Acoustic energy applied through the cleaning media results into two kinds of cavitation effects; namely stable and transient cavitation. A uniformly pulsating bubble transforms into stable cavitation behavior whereas a bubble implosion implies transient cavitation. Pattern damage of sensitive features on advanced masks as well as Ru pitting on EUVL reticles is mostly the result of transient cavitation. Stable cavitation on the other hand produces a very narrowly controlled energy distribution which allows cleaning without damage. Stable cavitation can be achieved by suitably tailoring physical, chemical and thermodynamic properties of the liquid and gas media. In this paper we investigate a new cleaning chemistry that has favorable physical and thermodynamic properties to produce stable MegaSonic cavitation. The cavitation created in this chemistry is characterized by measuring acoustic energy as well as by pattern damage and particle removal efficiency on mask level. The chemical properties (pH and zeta potential) of this chemistry are compared with conventional cleaning chemistries. Its effects on CD shift as well as phase and transmission loss are also studied.

Citation Download Citation

Sherjang Singh, Uwe Dietze, and Peter Dress "Effect of cleaning chemistry on MegaSonic damage", Proc. SPIE 8701, Photomask and Next-Generation Lithography Mask Technology XX, 870104 (28 June 2013); https://doi.org/10.1117/12.2027974

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available