Controlling MegaSonic performance by optimizing cleaning media's physical and gaseous properties

Hrishi Shende; SherJang Singh; James Baugh; Uwe Dietze; Peter Dress

doi:10.1117/12.979342

8 November 2012 Controlling MegaSonic performance by optimizing cleaning media's physical and gaseous properties

Hrishi Shende, SherJang Singh, James Baugh, Uwe Dietze, Peter Dress

Proceedings Volume 8522, Photomask Technology 2012; 852217 (2012) https://doi.org/10.1117/12.979342
Event: SPIE Photomask Technology, 2012, Monterey, California, United States

Abstract

As the feature size of the mask shrinks, the feature becomes more fragile and the potential for physical force damage during cleaning increases. At the same time, increased feature density of the mask makes it difficult to remove particles from congested trenches without physical force cleaning. Acoustic energy has the ability to suppress the hydro-dynamic boundary layer thereby transferring the physical force impact closer to particles trapped in the deep trenches of the mask. MegaSonic, which employs acoustic energy, is a preferred physical force cleaning technology for advanced masks. However MegaSonic can be extremely aggressive if the energy distribution is not contained within the narrowest process window available. In this paper, liquid media properties and their effect in controlling MegaSonic energy is evaluated. A chemistry is identified which provides favorable gaseous properties for controlling MegaSonic cavitation. The effect of this chemistry is characterized by measuring acoustic energy and Sonoluminscense. The phenomenon is further verified with pattern damage studies.

Citation Download Citation

Hrishi Shende, SherJang Singh, James Baugh, Uwe Dietze, and Peter Dress "Controlling MegaSonic performance by optimizing cleaning media's physical and gaseous properties", Proc. SPIE 8522, Photomask Technology 2012, 852217 (8 November 2012); https://doi.org/10.1117/12.979342

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