Holographic fabrication of nano-optical devices using single reflective optical element

Jeffrey Lutkenhaus; David George; David Garrett; Hualiang Zhang; Yuankun Lin

doi:10.1117/12.2002622

5 March 2013 Holographic fabrication of nano-optical devices using single reflective optical element

Jeffrey Lutkenhaus, David George, David Garrett, Hualiang Zhang, Yuankun Lin

Proceedings Volume 8613, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI; 86130O (2013) https://doi.org/10.1117/12.2002622
Event: SPIE MOEMS-MEMS, 2013, San Francisco, California, United States

Abstract

Abstract: Here we present holographic fabrications of large area nano-optical device templates, including nano-antenna and photonic quasi-crystals using a single reflective optical element (ROE) through single beam and a single exposure process. These ROEs consist of several silicon wafers arranged with 5 or 6-fold symmetry, supported by two plastic platforms. By changing the polarization of the incident beam, various photonic quasi-crystal including spiral quasicrystals can be fabricated using the 5-fold symmetrically arranged optical element. Using the single optical element with silicon chips arranged in 6-fold symmetry, large areas of nano gap arrays can be fabricated holographically. These nanogaps and their shapes can be controlled through the phase delay of one laser beam. The nano gap arrays will be used for fabrication of nano-antennas arrays after metal depositions.

Citation Download Citation

Jeffrey Lutkenhaus, David George, David Garrett, Hualiang Zhang, and Yuankun Lin "Holographic fabrication of nano-optical devices using single reflective optical element", Proc. SPIE 8613, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics VI, 86130O (5 March 2013); https://doi.org/10.1117/12.2002622

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KEYWORDS

Holography

Optical components

Silicon

Lithography

Nanolithography

Photonic crystals

Reflectivity

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