Fabrication of fine pitch gratings by holography, electron-beam lithography, and nano-imprint lithography

Darren Goodchild; Alexei Bogdanov; Simon Wingar; Bill Benyon; Nak Kim; Frank Shepherd

doi:10.1117/12.712212

21 March 2007 Fabrication of fine pitch gratings by holography, electron beam lithography and nano-imprint lithography

Darren Goodchild, Alexei Bogdanov, Simon Wingar, Bill Benyon, Nak Kim, Frank Shepherd

Proceedings Volume 6517, Emerging Lithographic Technologies XI; 651734 (2007) https://doi.org/10.1117/12.712212
Event: SPIE Advanced Lithography, 2007, San Jose, California, United States

Abstract

Fine pitch gratings (200 nm - 240 nm) are required for a variety of devices such as optical filters, semiconductor lasers and sensors for bio-medical applications. Various lithographic techniques are commercially available for fabricating gratings, with the choice depending on the type of grating required, cost and volume of manufacture. It is possible to use state of the art high-resolution projection steppers, common to silicon device manufacturing, for half pitch gratings down to 65 nm, but for much smaller volume manufacturing of photonic devices these tools have a prohibitive cost of ownership. Thus, remaining techniques for sub 120 nm half pitch gratings are holography, electron beam lithography, and nano-imprint lithography. In this paper we compare, characterize, and discuss the practical application of these three methods. Examples of gratings fabricated at the Canadian Photonics Fabrication Centre (CPFC) are shown as well as some application examples.

Citation Download Citation

Darren Goodchild, Alexei Bogdanov, Simon Wingar, Bill Benyon, Nak Kim, and Frank Shepherd "Fabrication of fine pitch gratings by holography, electron beam lithography and nano-imprint lithography", Proc. SPIE 6517, Emerging Lithographic Technologies XI, 651734 (21 March 2007); https://doi.org/10.1117/12.712212

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available