Study of silicon photonics based on standard CMOS foundry

Jianyi Yang; Yong Zhao; Chen Qiu; Wanjun Wang; Guomin Jiang; Yinlei Hao; Xiaoqing Jiang

doi:10.1117/12.870406

16 November 2010 Study of silicon photonics based on standard CMOS foundry

Jianyi Yang, Yong Zhao, Chen Qiu, Wanjun Wang, Guomin Jiang, Yinlei Hao, Xiaoqing Jiang

Proceedings Volume 7847, Optoelectronic Devices and Integration III; 78470E (2010) https://doi.org/10.1117/12.870406
Event: Photonics Asia 2010, 2010, Beijing, China

Abstract

Silicon photonics can found applications in optical interconnects and optical signal processing. Recent years, silicon photonics was developed rapidly. In this paper, we report our research work on silicon photonics. Based on the standard CMOS foundry, we studied the silicon waveguides and related photonic components.

Citation Download Citation

Jianyi Yang, Yong Zhao, Chen Qiu, Wanjun Wang, Guomin Jiang, Yinlei Hao, and Xiaoqing Jiang "Study of silicon photonics based on standard CMOS foundry", Proc. SPIE 7847, Optoelectronic Devices and Integration III, 78470E (16 November 2010); https://doi.org/10.1117/12.870406

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