Research on SOI-based micro-resonator devices

Xi Xiao; Haihua Xu; Yingtao Hu; Liang Zhou; Kang Xiong; Zhiyong Li; Yuntao Li; Zhongchao Fan; Weihua Han; Yude Yu; Jinzhong Yu

doi:10.1117/12.871719

19 October 2010 Research on SOI-based micro-resonator devices

Xi Xiao, Haihua Xu, Yingtao Hu, Liang Zhou, Kang Xiong, Zhiyong Li, Yuntao Li, Zhongchao Fan, Weihua Han, Yude Yu, Jinzhong Yu

Author Affiliations +

Proceedings Volume 7847, Optoelectronic Devices and Integration III; 78470D (2010) https://doi.org/10.1117/12.871719
Event: Photonics Asia 2010, 2010, Beijing, China

Abstract

SOI (silicon-on-insulator)-based micro-resonator is the key building block of silicon photonics, which is considered as a promising solution to alleviate the bandwidth bottleneck of on-chip interconnects. Silicon-based sub-micron waveguide, microring and microdisk devices are investigated in Institute of Semiconductors, Chinese Academy of Sciences. The main progress in recent years is presented in this talk, such as high Q factor single mode microdisk filters, compact thirdorder microring filters with the through/drop port extinctions to be ~ 30/40 dB, fast microring electro-optical switches with the switch time of < 400 ps and crosstalk < -23 dB, and > 10 Gbit/s high speed microring modulators.

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Xi Xiao, Haihua Xu, Yingtao Hu, Liang Zhou, Kang Xiong, Zhiyong Li, Yuntao Li, Zhongchao Fan, Weihua Han, Yude Yu, and Jinzhong Yu "Research on SOI-based micro-resonator devices", Proc. SPIE 7847, Optoelectronic Devices and Integration III, 78470D (19 October 2010); https://doi.org/10.1117/12.871719

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