Fabrication of MEMS structures by laser machining

Alexander Braun; Klaus-Peter Zimmer

doi:10.1117/12.418759

16 March 2001 Fabrication of MEMS structures by laser machining

Alexander Braun, Klaus-Peter Zimmer

Proceedings Volume 4236, Smart Electronics and MEMS II; (2001) https://doi.org/10.1117/12.418759
Event: Smart Materials and MEMS, 2000, Melbourne, Australia

Abstract

Excimer laser micromachining has emerged as an important manufacturing process for microsized mechanical and optical components. Using the projection mask technique this work presents and evaluates two new mask types capable of fabricating a variety of microstructures. The first new mask type is a combination of contour and gray scale mask made of chromium on quartz leading to an improved surface quality of the scanned polymer surface. The second new mask type is entirely made of quartz and makes use of tailored diffractive gratings which deflect parts of the originally illuminating laser beam beyond the solid angle of the used imaging system. This new type of gray scale mask has been applied in static laser ablation of polycarbonate fabricating 49 separate depth levels.

Citation Download Citation

Alexander Braun and Klaus-Peter Zimmer "Fabrication of MEMS structures by laser machining", Proc. SPIE 4236, Smart Electronics and MEMS II, (16 March 2001); https://doi.org/10.1117/12.418759

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