Excimer laser micromachining: a 15-year perspective

Malcolm C. Gower

doi:10.1117/12.352688

15 July 1999 Excimer laser micromachining: a 15-year perspective

Malcolm C. Gower

Proceedings Volume 3618, Laser Applications in Microelectronic and Optoelectronic Manufacturing IV; (1999) https://doi.org/10.1117/12.352688
Event: Optoelectronics '99 - Integrated Optoelectronic Devices, 1999, San Jose, CA, United States

Abstract

Reports in 1982 of polymers ablated and etched by excimer laser radiation mark the founding of laser micromachining as a technology that in the intervening period has matured into a manufacturing process used by a diverse range of industries. This paper describes some of these industrial applications.

Citation Download Citation

Malcolm C. Gower "Excimer laser micromachining: a 15-year perspective", Proc. SPIE 3618, Laser Applications in Microelectronic and Optoelectronic Manufacturing IV, (15 July 1999); https://doi.org/10.1117/12.352688

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