Patterning of magnetron sputtered SmCo films by excimer laser ablation

Yun H. Wang; Muralihar K. Ghantasala; Dinesh K. Sood; Erol C. Harvey

doi:10.1117/12.476351

13 November 2002 Patterning of magnetron sputtered SmCo films by excimer laser ablation

Yun H. Wang, Muralihar K. Ghantasala, Dinesh K. Sood, Erol C. Harvey

Proceedings Volume 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems; (2002) https://doi.org/10.1117/12.476351
Event: SPIE's International Symposium on Smart Materials, Nano-, and Micro- Smart Systems, 2002, Melbourne, Australia

Abstract

This paper presents the results of our investigations on excimer laser micromachining of SmCo thin films. These films were prepared onto silicon substrate with a SiO₂ layer and chromium film on the top. The ablation characteristics of the films were analysed by examining the surface topography using optical microscopy and Scanning Electron Spectroscopy (SEM). The quality of the etched patterns was evaluated in terms of sharpness of the edges, side wall profile and ratio of pattern mask size to feature size. The etch characteristics were studied over a wide range of laser parameters with the fluence in the range 0.25 J/cm² and 1.6 J/cm² and the number of shots varied from 1 to 50. The results showed that the precise nature of the resulting structure is a strong function of fluence and number of shots. These studies provide insight into the ablation behaviour of SmCo films and their potential applications in MEMS.

Citation Download Citation

Yun H. Wang, Muralihar K. Ghantasala, Dinesh K. Sood, and Erol C. Harvey "Patterning of magnetron sputtered SmCo films by excimer laser ablation", Proc. SPIE 4936, Nano- and Microtechnology: Materials, Processes, Packaging, and Systems, (13 November 2002); https://doi.org/10.1117/12.476351

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available