Submicron contact lithography for etching and lift-off applications using an i-line negative-tone photoresist with controllable slope

Howard Huang; Dallas M. Lea; Arthur W. Lichtenberger

doi:10.1117/12.275873

7 July 1997 Submicron contact lithography for etching and lift-off applications using an i-line negative-tone photoresist with controllable slope

Howard Huang, Dallas M. Lea, Arthur W. Lichtenberger

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Proceedings Volume 3049, Advances in Resist Technology and Processing XIV; (1997) https://doi.org/10.1117/12.275873
Event: Microlithography '97, 1997, Santa Clara, CA, United States

Abstract

We have used an i-line negative tone photoresist to define submicron masking features with contact lithography for applications in plasma etching, wet chemical processing, and liftoff. The resist used for our study is the Futurrex NR8 series. It is based on a polyhydroxystyrene resin structure rather than the polyisoprene matrix resin found in most conventional negative resists, and it uses an aqueous alkaline solution instead of an organic solvent for development. We have found this resist to be very thermally stable at relatively high temperatures, and is compatible with various plasma and wet chemical processes. Moreover, through proper selection of lithography parameters, the resist profile can be tailored to accurately obtain positive, vertical or negatively sloped sidewalls for specific applications. We have established liftoff processes of numerous kinds of evaporated and sputtered metals and oxides using the unique profile- controlling property of this resist. We present SEM images and data from a study of the effects of lithography parameters on resist profiles. Also included is the fabrication sequence of a submicron single layer self-aligned liftoff process using the NR8 resist. These results suggest potential applications in a wide variety of processes.

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Howard Huang, Dallas M. Lea, and Arthur W. Lichtenberger "Submicron contact lithography for etching and lift-off applications using an i-line negative-tone photoresist with controllable slope", Proc. SPIE 3049, Advances in Resist Technology and Processing XIV, (7 July 1997); https://doi.org/10.1117/12.275873

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KEYWORDS

Etching

Niobium

Photoresist processing

Photoresist materials

Metals

Lithography

Reactive ion etching

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